AEC Corporation

Application examples

	Measurement of vibrations, displacements, and rotations under vacuum conditions


General	By taking advantage of the environment resistance characteristics, vibrations, displacements, and rotations can be measured undervacuum conditions. The sensor unit is made of material that can be used in a vacuum, and the hermetic seal is used to separate a vacuum completely fromthe atmosphere.In actual applications, this GAP-SENSOR has been used in a vacuum of up to1.33 X 10-2 Pa.

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